Download E-books A Practical Guide to Optical Metrology for Thin Films PDF

By Michael Quinten

A one-stop, concise advisor on picking out and measuring skinny movie thickness by means of optical methods.

This useful publication covers the legislation of electromagnetic radiation and interplay of sunshine with subject, in addition to the idea and perform of thickness dimension, and sleek functions. In so doing, it indicates the services and possibilities of optical thickness selection and discusses the strengths and weaknesses of dimension units in addition to their assessment methods.

Following an creation to the subject, bankruptcy 2 provides the fundamentals of the propagation of sunshine and different electromagnetic radiation in area and subject. the most subject of this ebook, the decision of the thickness of a layer in a layer stack through measuring the spectral reflectance or transmittance, is taken care of within the following 3 chapters. the colour of skinny layers is mentioned in bankruptcy 6. ultimately, in bankruptcy 7, the writer discusses a number of commercial functions of the layer thickness dimension, together with high-reflection and anti-reflection coatings, photolithographic structuring of semiconductors, silicon on insulator, obvious conductive movies, oxides and polymers, skinny movie photovoltaics, and seriously doped silicon.

Aimed at business and educational researchers, engineers, builders and brands fascinated with all parts of optical layer and skinny optical movie dimension and metrology, method keep an eye on, real-time tracking, and applications.

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